Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbO$_x$ film growth

MLA

Franz, Robert, et al. Influence of Ionisation Zone Motion in High Power Impulse Magnetron Sputtering on Angular Ion Flux and NbO$_x$ Film Growth. 2015. EBSCOhost, https://doi.org/10.1088/0963-0252/25/1/015022.

APA

Franz, R., Clavero, C., Kolbeck, J., & Anders, A. (2015). Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbO$_x$ film growth. https://doi.org/10.1088/0963-0252/25/1/015022

Chicago

Franz, Robert, César Clavero, Jonathan Kolbeck, and André Anders. 2015. “Influence of Ionisation Zone Motion in High Power Impulse Magnetron Sputtering on Angular Ion Flux and NbO$_x$ Film Growth.” doi:10.1088/0963-0252/25/1/015022.