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Strongly coupled modes in a weakly driven micromechanical resonator
- Source :
- Appl. Phys. Lett. 101, 243111 (2012)
- Publication Year :
- 2012
-
Abstract
- We demonstrate strong coupling between the flexural vibration modes of a clamped-clamped micromechanical resonator vibrating at low amplitudes. This coupling enables the direct measurement of the frequency response via amplitude- and phase modulation schemes using the fundamental mode as a mechanical detector. In the linear regime, a frequency shift of $\mathrm{0.8\,Hz}$ is observed for a mode with a line width of $\mathrm{5.8\,Hz}$ in vacuum. The measured response is well-described by the analytical model based on the Euler-Bernoulli beam including tension. Calculations predict an upper limit for the room-temperature Q-factor of $\mathrm{4.5\times10^5}$ for our top-down fabricated micromechanical beam resonators.<br />Comment: 9 pages, 2 figures
- Subjects :
- Condensed Matter - Mesoscale and Nanoscale Physics
Subjects
Details
- Database :
- arXiv
- Journal :
- Appl. Phys. Lett. 101, 243111 (2012)
- Publication Type :
- Report
- Accession number :
- edsarx.1207.1594
- Document Type :
- Working Paper
- Full Text :
- https://doi.org/10.1063/1.4769182