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Heterogeneous integration of Si photodiodes on silicon nitride for near-infrared and visible light detection

Authors :
S. Cuyvers, A. Hermans, M. Kiewiet, J. Goyvaerts, G. Roelkens, K. Van Gasse, D. Van Thourhout, B. Kuyken
Source :
Optics Letters
Publication Year :
2022

Details

ISSN :
10944087
Database :
OpenAIRE
Journal :
Optics Letters
Accession number :
edsair.r3c4b2081b22..90d9bd23b37a79e28f2db09d355bdfca
Full Text :
https://doi.org/10.1364/ol.447636
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