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Pulsed DC magnetron sputtered Al2O3 films and their hardness

Authors :
Sridharan, Madana G.
Sillassen, Michael Brammer
Bøttiger, Jørgen
Chevallier, Jacques
Birkedal, Henrik
Source :
Sridharan, M G, Sillassen, M B, Bøttiger, J, Chevallier, J & Birkedal, H 2007, ' Pulsed DC magnetron sputtered Al 2 O 3 films and their hardness ', Surface & Coatings Technology, vol. 202, no. 4-7, pp. 920-924 .
Publication Year :
2007

Details

Language :
English
Database :
OpenAIRE
Journal :
Sridharan, M G, Sillassen, M B, Bøttiger, J, Chevallier, J & Birkedal, H 2007, ' Pulsed DC magnetron sputtered Al 2 O 3 films and their hardness ', Surface & Coatings Technology, vol. 202, no. 4-7, pp. 920-924 .
Accession number :
edsair.pure.au.......b35e23612718ab843011178cd6a40e16

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