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Cracking effects in squashable and stretchable thin metal films on PDMS for flexible microsystems and electronics

Authors :
Tiffany Baëtens
Emiliano Pallecchi
Vincent Thomy
Steve Arscott
Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN)
Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)
Bio-Micro-Electro-Mechanical Systems - IEMN (BIOMEMS - IEMN)
Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-Centrale Lille-Institut supérieur de l'électronique et du numérique (ISEN)-Université de Valenciennes et du Hainaut-Cambrésis (UVHC)-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)
Laboratoire Pierre Aigrain (LPA)
Fédération de recherche du Département de physique de l'Ecole Normale Supérieure - ENS Paris (FRDPENS)
École normale supérieure - Paris (ENS-PSL)
Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS-PSL)
Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Université Paris Diderot - Paris 7 (UPD7)-Centre National de la Recherche Scientifique (CNRS)
Carbon - IEMN (CARBON - IEMN)
Nano and Microsystems - IEMN (NAM6 - IEMN)
The authors would very much like to thank Dominique Deresmes for help with the AFM measurements, Christophe Boyaval for help with the SEM observations, Annie Fattorini for help with the metallization, Flavie Braud for help with the interference microscopy purchased within the EQUIPEX LEAF project (ANR-11-EQPX-0025), and Jean-Michel Mallet for help with adaptation of the strain applicator tool. This work was partially supported by the French RENATECH network.
Renatech Network
ANR-11-EQPX-0025,LEAF,Plateforme de traitement laser pour l'électronique flexible multifonctionnelle(2011)
Université Pierre et Marie Curie - Paris 6 (UPMC)-Université Paris Diderot - Paris 7 (UPD7)-Fédération de recherche du Département de physique de l'Ecole Normale Supérieure - ENS Paris (FRDPENS)
Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS Paris)
Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)-École normale supérieure - Paris (ENS Paris)
Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)-Centre National de la Recherche Scientifique (CNRS)
Source :
Scientific Reports, Scientific Reports, 2018, 8 (1), ⟨10.1038/s41598-018-27798-z⟩, Scientific Reports, Nature Publishing Group, 2018, 8 (1), ⟨10.1038/s41598-018-27798-z⟩, Scientific Reports, Vol 8, Iss 1, Pp 1-17 (2018)
Publication Year :
2018
Publisher :
HAL CCSD, 2018.

Abstract

International audience; Here, we study cracking of nanometre and sub-nanometre-thick metal lines (titanium, nickel, chromium, and gold) evaporated onto commercial polydimethylsiloxane (PDMS) substrates. Mechanical and electromechanical testing reveals potentially technologically useful effects by harnessing cracking. When the thin film metal lines are subjected to uniaxial longitudinal stretching, strain-induced cracks develop in the film. The regularity of the cracking is seen to depend on the applied longitudinal strain and film thickness—the findings suggest ordering and the possibility of creating metal mesas on flexible substrates without the necessity of lithography and etching. When the metal lines are aligned transversally to the direction of the applied strain, a Poisson effect-induced electrical ‘self-healing’ can be observed in the films. The Poisson effect causes process-induced cracks to short circuit, resulting in the lines being electrically conducting up to very high strains (~40%). Finally, cracking results in the observation of an enhanced transversal gauge factor which is ~50 times larger than the geometric gauge factor for continuous metal films—suggesting the possibility of high-sensitivity thin-film metal strain gauge flexible technology working up to high strains.

Details

Language :
English
ISSN :
20452322
Database :
OpenAIRE
Journal :
Scientific Reports, Scientific Reports, 2018, 8 (1), ⟨10.1038/s41598-018-27798-z⟩, Scientific Reports, Nature Publishing Group, 2018, 8 (1), ⟨10.1038/s41598-018-27798-z⟩, Scientific Reports, Vol 8, Iss 1, Pp 1-17 (2018)
Accession number :
edsair.pmid.dedup....e90211711bd728a48afc53635714df4d
Full Text :
https://doi.org/10.1038/s41598-018-27798-z⟩