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Edge-Contact MoS
- Source :
- ACS applied materialsinterfaces. 14(37)
- Publication Year :
- 2022
-
Abstract
- The science and engineering of two-dimensional materials (2DMs), in particular, of 2D semiconductors, is advancing at a thriving pace. It is well known that these delicate few-atoms thick materials can be damaged during the processing toward their integration into final devices. Thermal scanning probe lithography (t-SPL) is a gentle alternative to the typically used electron beam lithography to fabricate these devices avoiding the use of electrons, which are well known to deteriorate the 2DMs' properties. Here, t-SPL is used for the fabrication of MoS
Details
- ISSN :
- 19448252
- Volume :
- 14
- Issue :
- 37
- Database :
- OpenAIRE
- Journal :
- ACS applied materialsinterfaces
- Accession number :
- edsair.pmid..........698fab2d526fd03ebffa6185599348c4