Back to Search Start Over

Edge-Contact MoS

Authors :
Ana, Conde-Rubio
Xia, Liu
Giovanni, Boero
Jürgen, Brugger
Source :
ACS applied materialsinterfaces. 14(37)
Publication Year :
2022

Abstract

The science and engineering of two-dimensional materials (2DMs), in particular, of 2D semiconductors, is advancing at a thriving pace. It is well known that these delicate few-atoms thick materials can be damaged during the processing toward their integration into final devices. Thermal scanning probe lithography (t-SPL) is a gentle alternative to the typically used electron beam lithography to fabricate these devices avoiding the use of electrons, which are well known to deteriorate the 2DMs' properties. Here, t-SPL is used for the fabrication of MoS

Details

ISSN :
19448252
Volume :
14
Issue :
37
Database :
OpenAIRE
Journal :
ACS applied materialsinterfaces
Accession number :
edsair.pmid..........698fab2d526fd03ebffa6185599348c4