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Atomic Layer Deposition of In

Authors :
Yizhi, Wu
Bart, Macco
Dries, Vanhemel
Sebastian, Kölling
Marcel A, Verheijen
Paul M, Koenraad
Wilhelmus M M, Kessels
Fred, Roozeboom
Source :
ACS applied materialsinterfaces. 9(1)
Publication Year :
2016

Abstract

The atomic layer deposition (ALD) process of hydrogen-doped indium oxide (In

Details

ISSN :
19448252
Volume :
9
Issue :
1
Database :
OpenAIRE
Journal :
ACS applied materialsinterfaces
Accession number :
edsair.pmid..........64802e9bea9359394ed5219c0856ccb6