Back to Search
Start Over
TiO
- Source :
- Soft matter. 3(5)
- Publication Year :
- 2020
-
Abstract
- An increasing number of technologies require the fabrication of micro- and nanostructures over large areas. Soft lithographic methods are gaining in popularity for the manufacture of low-cost micrometre and sub-micrometre structures. Increasingly, these methods developed to structure organic resists can also be used to pattern inorganic materials. Here we introduce a simple lithographic technique that is able to pattern ceramic TiO micro- and nanostructures with high fidelity. Our method makes use of an electrohydrodynamic (EHD) film instability that is controlled by a laterally modulated electric field. A spin-coated film of a stabilized metal alkoxide precursor material was patterned using EHD lithography followed by a heat treatment at 400 °C to yield crystalline TiO micropatterns. Our technique is rather general and can be extended to a number of single- and multicomponent oxide systems.
Details
- ISSN :
- 17446848
- Volume :
- 3
- Issue :
- 5
- Database :
- OpenAIRE
- Journal :
- Soft matter
- Accession number :
- edsair.pmid..........56c9b1fc4dfa15ac1c9367e00a8d582c