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Lifetime Stability and Microstructure Properties of Cr/B₄C X-ray Reflective Multilayer Coatings

Lifetime Stability and Microstructure Properties of Cr/B₄C X-ray Reflective Multilayer Coatings

Authors :
Catherine, Burcklen
Regina, Soufli
Jennifer, Rebellato
Christopher, Walton
Evgueni, Meltchakov
Julien E, Rault
Eric, Gullikson
Franck, Delmotte
Source :
Journal of nanoscience and nanotechnology. 19(1)
Publication Year :
2018

Abstract

This paper demonstrates that highly reflective Cr/B₄C multilayer interference coatings with nanometric layer thicknesses, designed to operate in the soft X-ray photon energy range, have stable reflective performance for a period of 3 years after deposition. The microstructure and chemical composition of layers and interfaces within Cr/B₄C multilayers is also examined, with emphasis on the B₄C-on-Cr interface where a significant diffusion layer is formed and on the oxide in the top B₄C layer. Multiple characterization techniques (X-ray reflectivity at different photon energies, X-ray photoelectron spectroscopy, transmission electron microscopy, electron diffraction and X-ray diffraction) are employed and the results reveal a consistent picture of the Cr/B₄C layer structure.

Details

ISSN :
15334880
Volume :
19
Issue :
1
Database :
OpenAIRE
Journal :
Journal of nanoscience and nanotechnology
Accession number :
edsair.pmid..........394b8fc8e425edfc9b1ea31176d84903