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Lifetime Stability and Microstructure Properties of Cr/B₄C X-ray Reflective Multilayer Coatings
Lifetime Stability and Microstructure Properties of Cr/B₄C X-ray Reflective Multilayer Coatings
- Source :
- Journal of nanoscience and nanotechnology. 19(1)
- Publication Year :
- 2018
-
Abstract
- This paper demonstrates that highly reflective Cr/B₄C multilayer interference coatings with nanometric layer thicknesses, designed to operate in the soft X-ray photon energy range, have stable reflective performance for a period of 3 years after deposition. The microstructure and chemical composition of layers and interfaces within Cr/B₄C multilayers is also examined, with emphasis on the B₄C-on-Cr interface where a significant diffusion layer is formed and on the oxide in the top B₄C layer. Multiple characterization techniques (X-ray reflectivity at different photon energies, X-ray photoelectron spectroscopy, transmission electron microscopy, electron diffraction and X-ray diffraction) are employed and the results reveal a consistent picture of the Cr/B₄C layer structure.
Details
- ISSN :
- 15334880
- Volume :
- 19
- Issue :
- 1
- Database :
- OpenAIRE
- Journal :
- Journal of nanoscience and nanotechnology
- Accession number :
- edsair.pmid..........394b8fc8e425edfc9b1ea31176d84903