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Finite element analysis of stress evolution in Si based front and back ends micro structuresInternational Conferencre on Simulation of Semiconductor Processes and Devices

Authors :
Senez, V.
Armigliato, A.
Carlotti, Giovanni
Carnevale, G.
Jaouen, H.
de Wolff, I.
Publication Year :
2002

Details

Language :
English
Database :
OpenAIRE
Accession number :
edsair.od......3982..0e2fe5ff2de830b48686e7bbfb1fc979

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