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Influence of r.f. power on optical, electrical and structural properties of a-SiC:H alloys grown in SiH4+ CH4 and SiH4 + C2H2 gas mixtures
- Authors :
- AMBROSONE, GIUSEPPINA
CATALANOTTI, SERGIO
COSCIA, UBALDO
S. Mormone
A. Cutolo
BREGLIO, GIOVANNI
Ambrosone, Giuseppina
Catalanotti, Sergio
Coscia, Ubaldo
S., Mormone
A., Cutolo
Breglio, Giovanni
- Publication Year :
- 1998
- Publisher :
- European Commission, 1998.
Details
- Language :
- English
- Database :
- OpenAIRE
- Accession number :
- edsair.od......3730..3bebce6cfcc4aa48bbbc9815ae421803