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Floating electrode microelectromechanical system capacitive switches: A different actuation mechanism
- Publication Year :
- 2011
-
Abstract
- The paper investigates the actuation mechanism in floating electrode microelectromechanical system capacitive switches. It is demonstrated that in the pull-in state, the device operation turns from voltage to current controlled actuation. The current arises from Poole-Frenkel mechanism in the dielectric film and Fowler-Nordheim in the bridge-floating electrode air gap. The pull-out voltage seems to arise from the abrupt decrease of Fowler-Nordheim electric field intensity. This mechanism seems to be responsible for the very small difference with respect to the pull-in voltage. © 2011 American Institute of Physics.
Details
- Language :
- English
- Database :
- OpenAIRE
- Accession number :
- edsair.od......2127..631bafa5d6fea393ca76af89996176e0