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Deep-UV Lithography Fabrication of Slot Waveguides and Sandwiched Waveguides for Nonlinear Applications
- Publication Year :
- 2007
- Subjects :
- slot waveguides
integrated optics
fabrication
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Accession number :
- edsair.od......1943..3f7e1601b77bc20e412ce6146b82c92e