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Influence of crystallographic orientation on etch properties of TiN

Authors :
Dictus, Dries
Shamiryan, Denis
Paraschiv, Vasile
Boullart, Werner
De Gendt, Stefan
Vanhaelemeersch, Serge
Publication Year :
2006

Abstract

ispartof: proceedings of the 7th International Conference on Microelectronics and Interfaces ispartof: International Conference on Microelectronics and Interfaces location:Austin TX date:6 Mar - 8 Mar 2006 status: published

Details

Language :
English
Database :
OpenAIRE
Accession number :
edsair.od......1131..7709aead26a6ec74ca462377335dff5e

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