Mjerenje raspodjele elektronske energije u dvama područjima istosmjernog magnetrona za rasprašivanje

The electron energy distribution function (EEDF) at the edge of the cathode fall and positive column regions of Ar and He glow discharge were measured using a single Langmuir probe. The EEDF in the cathode fall region was found to be non-Maxwellian where two groups of electrons were detected. The two groups have no chance to be thermalized since they leave the cathode fall region fast. Sources of the two groups of electrons are discussed. Moreover, EEDF in the positive column region was found to be Maxwellian for both gases. Electrons have a chance to thermalize themselves due to the long plasma lifetime in this region.
Primjenom Langmuirove sonde mjerili smo funkciju raspodjele elektronske energije (EEDF) na rubu katodnog tamnog prostora i u pozitivnom stupcu tinjavog izboja u Ar i He. U katodnom tamnom prostoru našli smo ne-Maxwellov EEDF s dvjema grupama elektrona. Ove dvije grupe ne mogu se termalizirati jer brzo napuštaju prostor tinjavog izboja. Raspravljamo uzroke dviju grupa. Međutim, u pozitivnom stupcu smo našli Maxwellovu EEDF. U tom je području trajanje plazme dugo i elektroni se mogu termalizirati.