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Monte Carlo simulations of atomic layer deposition on 3D large surface area structures

Authors :
Cremers, Véronique
Geenen, Filip
Detavernier, Christophe
Dendooven, Jolien
Source :
Belgian Physical Society, General scientific meeting, Abstracts
Publication Year :
2016

Subjects

Subjects :
Technology and Engineering
Physics and Astronomy
atomic layer deposition
coating
simulations

Details

Language :
English
Database :
OpenAIRE
Journal :
Belgian Physical Society, General scientific meeting, Abstracts
Accession number :
edsair.od.......330..90fbdbd2759a0b07c4cf336ccc899d3c

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