In situ x-ray fluorescence measurements during ALD on flat substrates and in nanoporous

Authors :: Dendooven, Jolien
Deduytsche, Davy
Pulinthanathu Sree, Sreeprasanth
Korányi, Tamás I
Vanbutsele, Gina
Martens, Johan A
Ludwig, Karl F
Detavernier, Christophe
Source :: Atomic Layer Deposition, 10th International conference, Abstracts
Publication Year :: 2010

Language :: English
Database :: OpenAIRE
Journal :: Atomic Layer Deposition, 10th International conference, Abstracts
Accession number :: edsair.od.......330..67474234131e55e1351ab08b518fa7f0

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