Correlation between the nanoscale electrical and morphological properties of crystallized hafnium oxide-based metal oxide semiconductor structures

Subjects

Subjects :

Electric currents
Grain boundaries
Electrical properties
Dielectric thin films
Crystallization
Leakage currents

Details

Database :

OpenAIRE

Accession number :

edsair.od.......272..3bc053afbb7402b7a323d7072936f75b