Back to Search Start Over

Polyimide sacrificial layer process for SOI SG-MOSFET pressure sensor

Authors :
Fernández-Bolaños, M.
Abelé, N.
Bouvet, D.
Pott, V.
Racine, G.
Quero, J. M.
Ionescu, A. M.

Details

Database :
OpenAIRE
Accession number :
edsair.od.......185..a7eff4596e7af934ef9da642e26e69cd

Tools

Authors Abstract Subjects Details