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Hard-x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution

Authors :
Chu, Y. S.
Yi, J. M.
De Carlo, F.
Shen, Q.
Lee, Wah-Keat
Wu, H. J.
Wang, C. L.
Wang, J. Y.
Liu, C. J.
Wang, C. H.
Wu, S. R.
Chien, C. C.
Hwu, Y.
Tkachuk, A.
Yun, W.
Feser, M.
Liang, K. S.
Yang, C. S.
Je, J. H.
Margaritondo, G.
Publisher :
American Institute of Physics

Abstract

Substantial improvements in the nanofabrication and characteristics of gold Fresnel zone plates yielded unprecedented resolution levels in hard-x-ray microscopy. Tests performed on a variety of specimens with 8-10 keV photons demonstrated a first-order lateral resolution below 40 nm based on the Rayleigh criterion. Combined with the use of a phase contrast technique, this makes it possible to view features in the 30 nm range; good-quality images can be obtained at video rate, down to 50 ms/frame. The important repercussions on materials science, nanotechnology, and the life sciences are discussed. (C) 2008 American Institute of Physics.

Details

Database :
OpenAIRE
Accession number :
edsair.od.......185..8c6273efad810a999e3d9a5067775641