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MEMS-based nanotechnology

Authors :
Jansen, Henricus V.
Tas, Niels Roelof
Berenschot, Johan W.
Nalwa, H.S.
Source :
Encyclopedia of nanoscience and nanotechnology, 163-275, STARTPAGE=163;ENDPAGE=275;TITLE=Encyclopedia of nanoscience and nanotechnology
Publication Year :
2004
Publisher :
American Scientific Publishers, 2004.

Subjects

Subjects :
METIS-218306

Details

Database :
OpenAIRE
Journal :
Encyclopedia of nanoscience and nanotechnology, 163-275, STARTPAGE=163;ENDPAGE=275;TITLE=Encyclopedia of nanoscience and nanotechnology
Accession number :
edsair.narcis........704d7efcfe80b74a17982a311e82f4c9

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