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Integrated micromachining process for the fabrication of AIN piezoelectric microstructures

Authors :
Saravanan, S.
Berenschot, Johan W.
Krijnen, Gijsbertus J.M.
Elwenspoek, Michael Curt
Source :
Proc. of SAFE 2004
Publication Year :
2004

Subjects

Subjects :
METIS-219996

Details

Database :
OpenAIRE
Journal :
Proc. of SAFE 2004
Accession number :
edsair.narcis........4f9f3d880a90b3240bafff1374323fc2

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Authors Abstract Subjects Details