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Photoluminescence-based detection of particle contamination on EUV reticle

Authors :
Gao, An
Rizo, P.J.
Scaccabarozzi, L.
Lee, C.J.
Banine, V.
Bijkerk, F.
Faculty of Science and Technology
Laser Physics & Nonlinear Optics
Source :
SPIE Optical Engineering + Applications 2012
Publication Year :
2012

Subjects

Subjects :
METIS-292768
IR-83226

Details

Language :
English
Database :
OpenAIRE
Journal :
SPIE Optical Engineering + Applications 2012
Accession number :
edsair.narcis........2e916a2d7a42f5ecb7651b5ec2e01d60

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Authors Abstract Subjects Details