Influence of silicon orientation and cantilever undercut on the determination of Young's modulus of pulsed laser deposited PZT

Authors :: Nazeer, H.
Woldering, L.A.
Abelmann, Leon
Nguyen, Duc Minh
Rijnders, Augustinus J.H.M.
Elwenspoek, Michael Curt
Inorganic Materials Science
Faculty of Science and Technology
Source :: Proceedings of the 36th International Micro & Nano Engineering Conference (MNE 2010)
Publication Year :: 2010
Publisher :: MNE 2010 Organisation, 2010.
Abstract: In this work we show for the first time that the effective in-plane Young’s modulus of PbZr0.52Ti0.48O3 (PZT) thin films, deposited by pulsed laser deposition (PLD) on dedicated single crystal silicon cantilevers, is independent of the in-plane orientation of cantilevers.

Subjects :: METIS-281523
EWI-18729
IR-74553
Orientation
PZT
Pulsed laser deposition
Cantilever
Young’s modulus
TST-SMI: Formerly in EWI-SMI
TST-uSPAM: micro Scanning Probe Array Memory
Resonance frequency

Database :: OpenAIRE
Journal :: Proceedings of the 36th International Micro & Nano Engineering Conference (MNE 2010)
Accession number :: edsair.narcis........0ef85b6b32daaaa4652c70d7f588d6d4

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