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Area-Selective Atomic Layer Deposition of ZnO on SiSiO2 Modified with Tris(dimethylamino)methylsilane

Authors :
Linford, Behnam Moeini
Tahereh G. Avval
Hidde H. Brongersma
Stanislav Průša
Pavel Bábík
Elena Vaníčková
Brian R. Strohmeier
David S. Bell
Dennis Eggett
Steven M. George
Matthew R.
Source :
Materials; Volume 16; Issue 13; Pages: 4688
Publication Year :
2023
Publisher :
Multidisciplinary Digital Publishing Institute, 2023.

Abstract

Delayed atomic layer deposition (ALD) of ZnO, i.e., area selective (AS)-ALD, was successfully achieved on silicon wafers (SiSiO2) terminated with tris(dimethylamino)methylsilane (TDMAMS). This resist molecule was deposited in a home-built, near-atmospheric pressure, flow-through, gas-phase reactor. TDMAMS had previously been shown to react with SiSiO2 in a single cycle/reaction and to drastically reduce the number of silanols that remain at the surface. ZnO was deposited in a commercial ALD system using dimethylzinc (DMZ) as the zinc precursor and H2O as the coreactant. Deposition of TDMAMS was confirmed by spectroscopic ellipsometry (SE), X-ray photoelectron spectroscopy (XPS), and wetting. ALD of ZnO, including its selectivity on TDMAMS-terminated SiSiO2 (SiSiO2TDMAMS), was confirmed by in situ multi-wavelength ellipsometry, ex situ SE, XPS, and/or high-sensitivity/low-energy ion scattering (HS-LEIS). The thermal stability of the TDMAMS resist layer, which is an important parameter for AS-ALD, was investigated by heating SiSiO2TDMAMS in air and nitrogen at 330 °C. ALD of ZnO takes place more readily on SiSiO2TDMAMS heated in the air than in N2, suggesting greater damage to the surface heated in the air. To better understand the in situ ALD of ZnO on SiSiO2TDMAMS and modified (thermally stressed) forms of it, the ellipsometry results were plotted as the normalized growth per cycle. Even one short pulse of TDMAMS effectively passivates SiSiO2. TDMAMS can be a useful, small-molecule inhibitor of ALD of ZnO on SiSiO2 surfaces.

Details

Language :
English
ISSN :
19961944
Database :
OpenAIRE
Journal :
Materials; Volume 16; Issue 13; Pages: 4688
Accession number :
edsair.multidiscipl..6792e49090b09526fd3977a403b1f775
Full Text :
https://doi.org/10.3390/ma16134688