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Production of a High Density Plasma by Microwave Discharge
- Source :
- 姫路工業大学研究報告. A = Reports of Himeji Institute of Technology. 27:75-80
- Publication Year :
- 1974
Details
- Language :
- Japanese
- ISSN :
- 04391535
- Volume :
- 27
- Database :
- OpenAIRE
- Journal :
- 姫路工業大学研究報告. A = Reports of Himeji Institute of Technology
- Accession number :
- edsair.jairo.........da69f2c9c30fe0a459fbe7685c46d534