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積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性
- Authors :
- Konishi, Toshifumi
Yamane, Daisuke
Safu, Teruaki
Chen, Chun Yi
Chang, Tso-Fu Mark
Ito, Hiroyuki
Dosho, Shiro
Ishihara, Noboru
Sone, Masato
Machida, Katsuyuki
Masu, Kazuya
Iida, Shinichi
- Publication Year :
- 2018
Details
- Language :
- Japanese
- Database :
- OpenAIRE
- Accession number :
- edsair.jairo.........c1115e180ad292f8ffab17ba7d3b92b3