In-situ diagnostics with optical emission spectroscopy for DC-plasma diamond CVD in high gravity

Although it was confirmed that nucleation density and crystal growth rate in the diamond thin films by means of DC-plasma CVD were increased with increasing gravity, the reasons of these effects have not clearly been explained. To this end, an OES (optical emission spectroscopy) apparatus was installed in the high gravity equipment. In-situ plasma diagnostics enabled identification of the active species in the plasma, and a series of experiments were conducted for various experimental conditions with gravity, substrate temperatures, and methane concentration as the parameters.
資料番号: AA0046917068