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Optimization of (Al, Ti) N Thin Film Formation Process by Ion Beam Assisted Deposition(Physics, Processes, Instruments & Measurements)
- Source :
- Transactions of JWRI. 29(2):11-15
- Publication Year :
- 2000
- Publisher :
- 大阪大学接合科学研究所, 2000.
Details
- Language :
- English
- ISSN :
- 03874508
- Volume :
- 29
- Issue :
- 2
- Database :
- OpenAIRE
- Journal :
- Transactions of JWRI
- Accession number :
- edsair.jairo.........aca662d4511bf6a84c9c57004970250f