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プラズマエッチング装置に用いられるシール用FKM のラジカル劣化における応力の影響
Authors :
Wada, Yuma
Kurniawan, Winarto
Yamamoto, Tetsuya
KUBOUCHI, MASATOSHI
Source :
第53回化学工学会秋季大会 講演要旨集
.
Publication Year :
2022
Details
Language :
Japanese
Database :
OpenAIRE
Journal :
第53回化学工学会秋季大会 講演要旨集
Accession number :
edsair.jairo.........8d96e2d51d933087279398198a8831e9
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