半導体シリコン融液におけるマランゴニ対流:微小重力実験の成果

Surface-tension-driven flow of molten silicon was investigated under microgravity and on earth for liquid bridge configuration. In order to investigate instability structure in a molten silicon bridge, observed were temperature oscillation and its phase relationship using thermocouples, oscillation of a molten silicon bridge surface using phase shift interferometry, oscillation of melt/solid interface position oscillation and so on. Instability structure shows azimuthal wave number m, depending on an aspect ratio of a liquid bridge: Gamma = h(height)/r(radius). Surface-tension-driven-flow shows oxygen partial pressure dependence of an ambient atmosphere. This is due to oxygen partial pressure dependence of temperature coefficient of surface tension.
資料番号: AA0045947018
レポート番号: NAL SP-56