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Self-supporting tetrahedral amorphous carbon films consisting of multilayered structure prepared using filtered arc deposition

Authors :
Toru, HARIGAI
Yu, MIYAMOTO
Masafumi, YAMANO
Tsuyoshi, TANIMOTO
Yoshiyuki, SUDA
Hirofumi, TAKIKAWA
Takeshi, KAWANO
Nishiuchi, Mamiko
Sakaki, Hironao
Kondo, Kiminori
Satoru, KANEKO
Shinsuke, KUNITSUGU
Mamiko, Nishiuchi
Hironao, Sakaki
Kiminori, Kondo
Source :
Thin Solid Films. 675:123-127
Publication Year :
2019
Publisher :
Elsevier, 2019.

Abstract

Self-supporting 110-nm-thick tetrahedral amorphous carbon (ta-C) films with a multilayered structure were fabricated as a carbon film target for the laser-driven ion acceleration. The self-supporting ta-C films consisted of three layers with the thicknesses of 35 nm, 40 nm, and 35 nm thick, and the film density of 3.0 g/cm3, 2.7 g/cm3, and 3.0 g/cm3, respectively. The multilayered ta-C film was fabricated using the T-shape filtered arc deposition method on a Si substrate coated water-soluble material. Silk fibroin and dextran were used as the water-soluble material. The water-soluble material formed between a ta-C film and a Si substrate was dissolved, and then, the ta-C film released from the substrate. Thick single-layer ta-C films partially peeled off on the water-soluble material and broke during the dissolving process. Self-supporting ta-C films were obtained by scooping the released ta-C film on a perforated substrate. The laser was irradiated on the self-supporting ta-C films, and the ta-C film with a higher film thickness and/or film density showed a higher laser irradiation tolerance.

Details

Language :
English
ISSN :
00406090
Volume :
675
Database :
OpenAIRE
Journal :
Thin Solid Films
Accession number :
edsair.jairo.........6d00d4d214d6109d864cb4d34a853057