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Control Growth of Silicon Nanowires Array at Wafer-Scale Using High Rotating-Disk CVD

Authors :
Zhang, Xiao Mei
Akita, Hiroshi
Ihara, Manabu
Publication Year :
2016

Details

Language :
English
Database :
OpenAIRE
Accession number :
edsair.jairo.........6a8402a5be487e1938fdec01cc6b564d

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