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Simulation of a GaN MOVPE Process in a Vertical Crystal Growth Apparatus

Authors :
Daigo, Yoshiaki
Mizushima, Ichiro
Yoda, Takashi
Shiraishi, Kenji
Publication Year :
2019

Details

Language :
Japanese
Database :
OpenAIRE
Accession number :
edsair.jairo.........06dd5404fe102908a16cd481efdd7cc5

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