Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires

We report on the extended infrared single photon response of niobium nitride supercon- ducting nanowires deposited by atomic layer deposition. The superconducting nanowire single-photon detectors are based on 4.65 nm thick NbN, patterned into 100 nm meanders and characterized at 2.5 K. We verify single-photon sensitivity from 1310 nm to 2006 nm with saturated response at shorter wavelengths.