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On the Breakdown Voltage Temperature Dependence of High-Voltage Power Diode Passivated with Diamond-Like Carbon

Authors :
Luigi Balestra
Susanna Reggiani
Jan Vobecky
Elena Gnani
J. Dobrzynska
Antonio Gnudi
Balestra, Luigi
Reggiani, Susanna
Gnudi, Antonio
Gnani, Elena
Dobrzynska, Jagoda
Vobecky, Jan
Source :
2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS).
Publication Year :
2021
Publisher :
IEEE, 2021.

Abstract

Diamond-Like Carbon (DLC) is well established material for the passivation of high voltage negative beveled power diode. In our previous works, the conduction mechanism of the DLC has been carefully described through the characterization and the physical modeling of Metal-Insulator-Semiconductor (MIS) structures. In addition, the effects on the breakdown voltage and leakage current have been clarified comparing the available experiments with numerical simulations. However, the role played by the DLC on the breakdown voltage temperature dependence is still lacking. In this work, it has been investigated assuming a release of the trapped charges with increasing temperatures.

Details

Database :
OpenAIRE
Journal :
2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS)
Accession number :
edsair.doi.dedup.....f95de037970844d2392291e2fa7c73e7