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On the Breakdown Voltage Temperature Dependence of High-Voltage Power Diode Passivated with Diamond-Like Carbon
- Source :
- 2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS).
- Publication Year :
- 2021
- Publisher :
- IEEE, 2021.
-
Abstract
- Diamond-Like Carbon (DLC) is well established material for the passivation of high voltage negative beveled power diode. In our previous works, the conduction mechanism of the DLC has been carefully described through the characterization and the physical modeling of Metal-Insulator-Semiconductor (MIS) structures. In addition, the effects on the breakdown voltage and leakage current have been clarified comparing the available experiments with numerical simulations. However, the role played by the DLC on the breakdown voltage temperature dependence is still lacking. In this work, it has been investigated assuming a release of the trapped charges with increasing temperatures.
- Subjects :
- Materials science
Diamond-like carbon
Passivation
Silicon
business.industry
Doping
chemistry.chemical_element
Diamond-Like Carbon, Power diode, Junction Termination, Breakdown Voltage
High voltage
Condensed Matter Physics
Thermal conduction
Temperature measurement
Electronic, Optical and Magnetic Materials
chemistry
Materials Chemistry
Optoelectronics
Breakdown voltage
Electrical and Electronic Engineering
business
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS)
- Accession number :
- edsair.doi.dedup.....f95de037970844d2392291e2fa7c73e7