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Odd electron diffraction patterns in silicon nanowires and silicon thin films explained by microtwins and nanotwins

Authors :
Celine Mouchet
Jean-Luc Rouvière
Cyril Cayron
Emmanuelle Rouvière
Laurence Latu-Romain
M. den Hertog
C. Secouard
Jean-Pierre Simonato
Clot, Marielle
Laboratoire des technologies de la microélectronique (LTM)
Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS)
Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)
Source :
Journal of Applied Crystallography, Journal of Applied Crystallography, International Union of Crystallography, 2009, 42, (2009), p1-11, Journal of Applied Crystallography, 2009, 42, (2009), p1-11
Publication Year :
2009
Publisher :
International Union of Crystallography (IUCr), 2009.

Abstract

Anomalous extra spots visible in electron diffraction patterns of silicon nanowires and silicon thin films are explained by the presence of micro- and nanotwins.<br />Odd electron diffraction patterns (EDPs) have been obtained by transmission electron microscopy (TEM) on silicon nanowires grown via the vapour–liquid–solid method and on silicon thin films deposited by electron beam evaporation. Many explanations have been given in the past, without consensus among the scientific community: size artifacts, twinning artifacts or, more widely accepted, the existence of new hexagonal Si phases. In order to resolve this issue, the microstructures of Si nanowires and Si thin films have been characterized by TEM, high-resolution transmission electron microscopy (HRTEM) and high-resolution scanning transmission electron microscopy. Despite the differences in the geometries and elaboration processes, the EDPs of the materials show great similarities. The different hypotheses reported in the literature have been investigated. It was found that the positions of the diffraction spots in the EDPs could be reproduced by simulating a hexagonal structure with c/a = 12(2/3)1/2, but the intensities in many EDPs remained unexplained. Finally, it was established that all the experimental data, i.e. EDPs and HRTEM images, agree with a classical cubic silicon structure containing two microstructural defects: (i) overlapping Σ3 microtwins which induce extra spots by double diffraction, and (ii) nanotwins which induce extra spots as a result of streaking effects. It is concluded that there is no hexagonal phase in the Si nanowires and the Si thin films presented in this work.

Details

ISSN :
00218898 and 16005767
Volume :
42
Database :
OpenAIRE
Journal :
Journal of Applied Crystallography
Accession number :
edsair.doi.dedup.....f794051f85edf06dd5204b2ab24db204
Full Text :
https://doi.org/10.1107/s0021889808042131