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Single-etch grating coupler for micrometric silicon rib waveguides
- Source :
- Optics Letters. 36:2647
- Publication Year :
- 2011
- Publisher :
- The Optical Society, 2011.
-
Abstract
- Grating couplers are widely used as an efficient and versatile fiber-chip coupling structure in nanometric silicon wire waveguides. The implementation of efficient grating couplers in micrometric silicon-on-insulator (SOI) rib waveguides is, however, challenging, since the coupler waveguide region is multimode. Here we experimentally demonstrate grating couplers in 1:5 ?m-thick SOI rib waveguides with a coupling efficiency of ?2:2 dB and a 3 dB bandwidth of 40nm. An inverse taper is used to adiabatically transform the interconnection waveguide mode to the optimum grating coupler excitation field with negligible higher order Bloch mode excitation. Couplers are fabricated in the same etch step as the waveguides using i-line stepper lithography. The benefits of wafer-scale testing and device characterization without facet preparation are thus attained at no additional cost. © 2011 Optical Society of America.
- Subjects :
- Waveguide (electromagnetism)
device characterization
Materials science
excitation field
Silicon on insulator
Grating
law.invention
Optics
waveguide mode
law
Blazed grating
multimodes
wafer-scale
Stepper
Lithography
Diffraction grating
I-line steppers
Multi-mode optical fiber
additional costs
business.industry
silicon wafers
higher order
grating couplers
coupling efficiency
waveguides
rib waveguides
Bloch modes
fiber chip coupling
silicon wire waveguides
Atomic and Molecular Physics, and Optics
silicon rib waveguides
nanometrics
3 dB bandwidth
business
silicon-on-insulators
Subjects
Details
- ISSN :
- 15394794 and 01469592
- Volume :
- 36
- Database :
- OpenAIRE
- Journal :
- Optics Letters
- Accession number :
- edsair.doi.dedup.....f54c62b19517585f74e0383dca952399