Back to Search Start Over

Nickel and gold identification in p-type silicon through TDLS: a modeling study

Authors :
Sarra Dehili
Damien Barakel
Olivier Palais
Laurent Ottaviani
Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP)
Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)
Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS)-Aix Marseille Université (AMU)
Source :
European Physical Journal: Applied Physics, European Physical Journal: Applied Physics, 2021, 93 (4), pp.40101. ⟨10.1051/epjap/2021210015⟩, European Physical Journal: Applied Physics, EDP Sciences, 2021, 93 (4), pp.40101. ⟨10.1051/epjap/2021210015⟩
Publication Year :
2021
Publisher :
HAL CCSD, 2021.

Abstract

In Silicon, impurities introduce recombination centers and degrade the minority carrier lifetime. It is therefore important to identify the nature of these impurities through their characteristics: the capture cross sectionσand the defect levelEt. For this purpose, a study of the bulk lifetime of minority carriers can be carried out. The temperature dependence of the lifetime based on the Shockley-Read-Hall (SRH) statistic and related to recombination through defects is studied. Nickel and gold in p-type Si have been selected for the SRH lifetime modeling. The objective of the analysis is to carry out a study to evaluate gold and nickel identification prior to temperature-dependent lifetime measurements using the microwave phase-shift (μW-PS) technique. The μW-PS is derived from the PCD technique and is sensitive to lower impurity concentrations. It has been shown that both gold and nickel can be unambiguously identified from the calculated TDLS curves.

Details

Language :
English
ISSN :
12860042 and 12860050
Database :
OpenAIRE
Journal :
European Physical Journal: Applied Physics, European Physical Journal: Applied Physics, 2021, 93 (4), pp.40101. ⟨10.1051/epjap/2021210015⟩, European Physical Journal: Applied Physics, EDP Sciences, 2021, 93 (4), pp.40101. ⟨10.1051/epjap/2021210015⟩
Accession number :
edsair.doi.dedup.....f493bcca6dd547c624a1f74d65bb0847