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Innovative solution to avoid glass substrate bending in a chalcopyrite solar cell fabrication process
- Source :
- Thin Solid Films, Thin Solid Films, 2018, 653, pp.194-199. ⟨10.1016/j.tsf.2018.03.043⟩, Thin Solid Films, Elsevier, 2018, 653, pp.194-199. ⟨10.1016/j.tsf.2018.03.043⟩
- Publication Year :
- 2018
- Publisher :
- Elsevier BV, 2018.
-
Abstract
- Considering the chalcopyrite solar cell fabrication process, the commonly reported substrate bending effect that is observed after thermal process, in a front side halogen lamp-based annealing configuration (Rapid Thermal Annealing –RTA- equipment), has been investigated. We first proposed a simple model explaining the substrate bending shape dependence on the initial stress state within the molybdenum (Mo) layer (free, tensile or compressive). Then, we showed that it is possible to overcome this issue by simply using a reactive (oxygen based) sputtering process for the deposition of the Mo layer. Finally, we showed that using a bilayer structure Mo(O)/Mo allows a more precise control of the flatness of the annealed samples. To understand the mechanisms governing such changes in substrate bending, structural and morphological material changes as a function of oxygen flow have been investigated by using X-ray diffraction and scanning electron microscope imaging, respectively. The elemental distribution throughout the Mo(O)/Mo bilayer structure thickness was also investigated.
- Subjects :
- Materials science
Annealing (metallurgy)
Scanning electron microscope
chemistry.chemical_element
02 engineering and technology
7. Clean energy
01 natural sciences
[SPI.MAT]Engineering Sciences [physics]/Materials
law.invention
[SPI]Engineering Sciences [physics]
law
Sputtering
0103 physical sciences
Ultimate tensile strength
Materials Chemistry
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Composite material
ComputingMilieux_MISCELLANEOUS
010302 applied physics
Chalcopyrite
Bilayer
Metals and Alloys
Surfaces and Interfaces
021001 nanoscience & nanotechnology
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Halogen lamp
chemistry
Molybdenum
visual_art
visual_art.visual_art_medium
0210 nano-technology
Subjects
Details
- ISSN :
- 00406090
- Volume :
- 653
- Database :
- OpenAIRE
- Journal :
- Thin Solid Films
- Accession number :
- edsair.doi.dedup.....f3e25eef2fa9c48ec0d24941d553c10b