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NbN superconducting nanonetwork fabricated using porous silicon templates and high-resolution electron beam lithography
- Source :
- Nanotechnology. 28(46)
- Publication Year :
- 2017
-
Abstract
- Superconducting NbN nanonetworks with a very small number of interconnected nanowires, with diameter of the order of 4 nm, are fabricated combining a bottom-up (use of porous silicon nanotemplates) with a top-down technique (high-resolution electron beam lithography). The method is easy to control and allows the fabrication of devices, on a robust support, with electrical properties close to a one-dimensional superconductor that can be used fruitfully for novel applications.
- Subjects :
- Fabrication
Materials science
Nanowire
Bioengineering
Nanotechnology
02 engineering and technology
Porous silicon
01 natural sciences
Settore FIS/03 - Fisica della Materia
electron beam lithography
0103 physical sciences
General Materials Science
one-dimensional superconductivity
Electrical and Electronic Engineering
010306 general physics
Superconductivity
quantum phase slips
Mechanical Engineering
Chemistry (all)
General Chemistry
Nanonetwork
021001 nanoscience & nanotechnology
porous silicon
Materials Science (all)
Mechanics of Materials
X-ray lithography
0210 nano-technology
Next-generation lithography
Electron-beam lithography
Subjects
Details
- ISSN :
- 13616528
- Volume :
- 28
- Issue :
- 46
- Database :
- OpenAIRE
- Journal :
- Nanotechnology
- Accession number :
- edsair.doi.dedup.....ee84b692634fb59b5aa5f9afb8a8a811