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Fabrication of Circuits on Flexible Substrates Using Conductive SU-8 for Sensing Applications
- Source :
- Sensors (Basel, Switzerland), Sensors; Volume 17; Issue 6; Pages: 1420
- Publication Year :
- 2017
-
Abstract
- This article describes a new low-cost rapid microfabrication technology for high-density interconnects and passive devices on flexible substrates for sensing applications. Silver nanoparticles with an average size of 80 nm were used to create a conductive SU-8 mixture with a concentration of wt 25%. The patterned structures after hard baking have a sheet resistance of 11.17 Ω /□. This conductive SU-8 was used to pattern planar inductors, capacitors and interconnection lines on flexible Kapton film. The conductive SU-8 structures were used as a seed layer for a subsequent electroplating process to increase the conductivity of the devices. Examples of inductors, resistor-capacitor (RC) and inductor-capacitor (LC) circuits, interconnection lines and a near-field communication (NFC) antenna are presented as a demonstration. As an example of high-resolution miniaturization, we fabricated microinductors having line widths of 5 μ m. Mechanical bending tests were successful down to a 5 mm radius. To the best of the authors’ knowledge, this is the first report of conductive SU-8 used to fabricate such planar devices and the first on flexible substrates. This is a proof of concept that this fabrication approach can be used as an alternative for microfabrication of planar passive devices on flexible substrates.
- Subjects :
- silver nanoparticles
Fabrication
Materials science
02 engineering and technology
interconnections
010402 general chemistry
01 natural sciences
Biochemistry
Article
Analytical Chemistry
law.invention
law
percolation threshold
Miniaturization
planar inductors
Electrical and Electronic Engineering
Instrumentation
Sheet resistance
Electronic circuit
Interconnection
business.industry
Electrical engineering
passive filters
021001 nanoscience & nanotechnology
Atomic and Molecular Physics, and Optics
0104 chemical sciences
Kapton
SU-8
Capacitor
Optoelectronics
0210 nano-technology
business
Microfabrication
Subjects
Details
- ISSN :
- 14248220
- Volume :
- 17
- Issue :
- 6
- Database :
- OpenAIRE
- Journal :
- Sensors (Basel, Switzerland)
- Accession number :
- edsair.doi.dedup.....e9e42dc8d33f518bb10d7869590c87e3