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Synthesis and Characterization of Pb(Zr 𝟎 . 𝟓 𝟑 , Ti 𝟎 . 𝟒 𝟕 )O 𝟑 -Pb(Nb 𝟏 / 𝟑 , Zn 𝟐 / 𝟑 )O 𝟑 Thin Film Cantilevers for Energy Harvesting Applications
- Source :
- Smart Materials Research.
- Publication Year :
- 2012
- Publisher :
- Hindawi Publishing Corporation, 2012.
-
Abstract
- A complete analysis of the morphology, crystallographic orientation, and resulting electrical properties of Pb(Zr0.53,Ti0.47) Pb(Nb1/3, Zn2/3)O3 (PZT-PZN) thin films, as well as the electrical behavior when integrated in a cantilever for energy harvesting applications, is presented. The PZT-PZN films were deposited using sol-gel methods. We report that using 20% excess Pb, a nucleation layer of PbTiO3 (PT), and a fast ramp rate provides large grains, as well as denser films. The PZT-PZN is deposited on a stack of TiO2/PECVD SiO2/Si3N4/thermal SiO2/Poly-Si/Si. This stack is designed to allow wet-etching the poly-Si layer to release the cantilever structures. It was also found that the introduction of the poly-Si layer results in larger grains in the PZT-PZN film. PZT-PZN films with a dielectric constant of 3200 and maximum polarization of 30 μC/cm2 were obtained. The fabricated cantilever devices produced ~300–400 mV peak-to-peak depending on the cantilever design. Experimental results are compared with simulations.
Details
- Language :
- English
- ISSN :
- 20903561
- Database :
- OpenAIRE
- Journal :
- Smart Materials Research
- Accession number :
- edsair.doi.dedup.....e80bde515a1af831db910ebe1ac21273
- Full Text :
- https://doi.org/10.1155/2012/872439