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Development of SOI pixel process technology

Details

Language :
English
ISSN :
01689002
Volume :
636
Issue :
1 Supplement 1
Database :
OpenAIRE
Journal :
Nuclear Instruments & Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment
Accession number :
edsair.doi.dedup.....e480b5603c68439d06134c3602fcf998