Study of Ferroelectric Bi 3.25 La 0.75 Ti 3 O 12 Thin Films Deposited by Sol-Gel Method

Powders and thin films of ferroelectric Bi3.25La0.75Ti3O12 (BLT) have been prepared from a sol-gel precursor heated at various temperatures, up to 600°C. The BLT precursor and the BLT powders have been characterized by thermal analyses, X-ray diffraction (XRD), scanning and transmission electron microscopy (SEM and TEM). Then, the precursor has been used to deposit thin films of ferroelectric BLT on specific silicon substrates, using a specific spin coating process. The thin films have been characterized by XRD, SEM and ellipsometry. Electrical polarization analyses have been finally performed on these films, and performing remnant polarization has been obtained.