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Cluster secondary ion emission of silicon: An influence of the samples' dimensional features

Details

ISSN :
10970231
Volume :
33
Issue :
3
Database :
OpenAIRE
Journal :
Rapid communications in mass spectrometry : RCM
Accession number :
edsair.doi.dedup.....dc5ef00c8525918a9f4605575c36e7d7