Nanomechanical Characterization of Organic Surface Passivation Films on 50 nm Patterns during Area-Selective Deposition

Authors :: Alessandro Viva
Stefanie Sergeant
Stefan De Gendt
Mattia Pasquali
Silvia Armini
Valentina Spampinato
Thierry Conard
Publication Year :: 2021

Subjects :: Materials science
Passivation
02 engineering and technology
010402 general chemistry
021001 nanoscience & nanotechnology
Selective deposition
01 natural sciences
0104 chemical sciences
Electronic, Optical and Magnetic Materials
Characterization (materials science)
Chemical engineering
Materials Chemistry
Electrochemistry
0210 nano-technology

Tools