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Micro-spectroscopy on silicon wafers and solar cells
- Source :
- Nanoscale Research Letters, Vol 6, Iss 1, p 197 (2011), Nanoscale Research Letters
- Publication Year :
- 2011
-
Abstract
- Micro-Raman (μRS) and micro-photoluminescence spectroscopy (μPLS) are demonstrated as valuable characterization techniques for fundamental research on silicon as well as for technological issues in the photovoltaic production. We measure the quantitative carrier recombination lifetime and the doping density with submicron resolution by μPLS and μRS. μPLS utilizes the carrier diffusion from a point excitation source and μRS the hole density-dependent Fano resonances of the first order Raman peak. This is demonstrated on micro defects in multicrystalline silicon. In comparison with the stress measurement by μRS, these measurements reveal the influence of stress on the recombination activity of metal precipitates. This can be attributed to the strong stress dependence of the carrier mobility (piezoresistance) of silicon. With the aim of evaluating technological process steps, Fano resonances in μRS measurements are analyzed for the determination of the doping density and the carrier lifetime in selective emitters, laser fired doping structures, and back surface fields, while μPLS can show the micron-sized damage induced by the respective processes.
- Subjects :
- Electron mobility
Materials science
Silicon
Messtechnik und Produktionskontrolle
chemistry.chemical_element
Nanotechnology
Siliciummaterialcharakterisierung
symbols.namesake
Materials Science(all)
lcsh:TA401-492
General Materials Science
Wafer
Charakterisierung
Spectroscopy
Solarzellen - Entwicklung und Charakterisierung
Nano Express
business.industry
Doping
Fano resonance
Carrier lifetime
Feedstock
Condensed Matter Physics
Kristallisation und Wafering
Silicium-Photovoltaik
chemistry
symbols
Optoelectronics
lcsh:Materials of engineering and construction. Mechanics of materials
Raman spectroscopy
business
Zellen und Module
Charakterisierung von Prozess- und Silicium-Materialien
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- Nanoscale Research Letters, Vol 6, Iss 1, p 197 (2011), Nanoscale Research Letters
- Accession number :
- edsair.doi.dedup.....da31c531fa05944d5448ce82aa41d76c