High quality factor photonic resonators for nitride quantum dots

Phone: þ00 33 4 67 14 37 89, Fax: 00 33 4 67 14 37 60We report the realization and the optical study of nitridephotonic resonators dedicated to the blue and UV spectralrange. Microdisks and photonic crystal (PC) cavities areinvestigated containing GaN/AlN quantum dots (QDs)embedded in an AlN waveguide. The PC cavities are fabricatedthrough the conformal growth of nitrides on a patterned Sisubstrate,and presentdelocalized and confinedcavity modesintheir microphotoluminescence spectra, that are compared tosimulations. A large quality factor of 1800 is reached for amodified L3 cavity. In the case of microdisks, which arefabricated through a classical top-down approach, the series ofwhispering gallery modes (WGMs) with large quality factors(up to 7300) are observed and analysed.