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Polyimide and SU-8 microfluidic devices manufactured by heat-depolymerizable sacrificial material technique
- Source :
- Lab on a Chip. 4:114
- Publication Year :
- 2004
- Publisher :
- Royal Society of Chemistry (RSC), 2004.
-
Abstract
- The following paper describes a sacrificial layer method for the manufacturing of microfluidic devices in polyimide and SU-8. The technique uses heat-depolymerizable polycarbonates embedded in polyimide or SU-8 for the generation of microchannels and sealed cavities. The volatile decomposition products originating from thermolysis of the sacrificial material escape out of the embedding material by diffusion through the cover layer. The fabrication process was studied experimentally and theoretically with a focus on the decomposition of the sacrificial materials and their diffusion through the polyimide or SU-8 cover layer. It is demonstrated that the sacrificial material removal process is independent of the actual channel geometry and advances linearly with time unlike conventional sacrificial layer techniques. The fabrication method provides a versatile and fast technique for the manufacturing of microfluidic devices for applications in the field of microTAS and Lab-on-a-Chip.
- Subjects :
- Fabrication
Materials science
Polymers
Microfluidics
Thermal decomposition
Biomedical Engineering
Bioengineering
Material removal
Nanotechnology
Equipment Design
General Chemistry
Imides
Polypropylenes
Channel geometry
Biochemistry
Coated Materials, Biocompatible
Thermogravimetry
Microscopy, Electron, Scanning
Polyethylenes
Diffusion (business)
Layer (electronics)
Polyimide
Subjects
Details
- ISSN :
- 14730189 and 14730197
- Volume :
- 4
- Database :
- OpenAIRE
- Journal :
- Lab on a Chip
- Accession number :
- edsair.doi.dedup.....d33a9ff733ebe018e3169cb5236a77da